SAN FRANCISCO, CA ‚– Simrit ‚– the industrial sealing products division of Freudenberg-NOK ‚– will debut its Simriz‚® 508 material during SEMICON West 2008. Simrit‚’s new material was specifically developed for demanding, high-temperature static and dynamic sealing applications in dry chemical environments.
Simriz 508 is a white perfluoroelastomer (FFKM) material that has a service temperature range of negative six to 300 degrees Celsius and exhibits excellent plasma resistance and minimum particulation in a wide-range of plasma environments. The O-ring is a cost-effective sealing solution that offers very low trace element contamination in both wet and plasma applications.
Ideal for a variety of dry processes, including deposition, oxide and metal plasma etching, ashing, metallization, ion implant and others, the Simriz 508 material is appropriate for the following equipment locations: chamber lid seals; bell jar seals; endpoint windows; gas inlet seals; isolator valve seals; KF fittings; slit valve seals; valve seals; and window seals.
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